Field Emission Gun Scanning Electron Microscopy

Sirion 200

Elemental content mapped by Energy Dispersive X-Ray Analysis (EDX)
Elemental content mapped by Energy Dispersive X-Ray Analysis (EDX)

Scanning electron microscopy (SEM, ESEM and FEGSEM) produces an image of the sample by scanning a high energy beam of electrons over its surface which intereacts with the atoms. This provides inormation on the

  • topography
  • compostion
  • electrical conductivity

The FEGSEM facility is an ultra-high resolution Schottky field emission scanning electron microscope and is ideal for studying materials on the nanometre scale.  The microscope is equipped with energy dispersive X-ray analysis (EDX)  and electron backscattered diffraction (EBSD). 

SEM image of a salt crystal

The key features of the FEGSEM are:

  • Immersion lens electron optics and in-lens detector technology
  • High resolution secondary electron (SE) and back-scattered electron (BSE) imaging;
  • Instrument resolution  of 3.5nm at 500V, 2.5nm at 1kV and 1.5nm at 10kV
  • Scanning transmission electron microscopy (STEM)  detector for  bright-field and dark-field images of a TEM-prepared sample
  • Ultra-high resolution analysis with the STEM detector (20 nm spatial resolution EDX in STEM mode)
  • Princeton Gamma Technology Spirit energy dispersive X-ray analysis system with a 50mm2 germanium detector for light element analysis at low accelerating voltages
  • HKL Technology Channel 5 EBSD system which will allow imaging, diffraction pattern acquisition and indexing, phase identification, orientation mapping, determination of pole figures, and orientation distribution function calculations.

 Submit an enquiry 

If you are unsure of your requirements, please submit an enquiry using the link above. We can offer bespoke testing parameters tailored to your needs.

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Contact Details

College of Science and Engineering
Physics Building
University of Leicester 
Tel: 0116 252 3497